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	<updated>2026-08-09T16:54:44Z</updated>
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		<title>Bensen: Created page with &quot;&lt;ref name=Renishaw&gt;{{cite web |url=http://resources.renishaw.com/en/download/white-paper-homodyne-and-heterodyne-interferometry--5653 |title=Heterodyne and homodyne interferom...&quot;</title>
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		<updated>2021-02-15T15:43:05Z</updated>

		<summary type="html">&lt;p&gt;Created page with &amp;quot;&amp;lt;ref name=Renishaw&amp;gt;{{cite web |url=http://resources.renishaw.com/en/download/white-paper-homodyne-and-heterodyne-interferometry--5653 |title=Heterodyne and homodyne interferom...&amp;quot;&lt;/p&gt;
&lt;p&gt;&lt;b&gt;New page&lt;/b&gt;&lt;/p&gt;&lt;div&gt;&amp;lt;ref name=Renishaw&amp;gt;{{cite web |url=http://resources.renishaw.com/en/download/white-paper-homodyne-and-heterodyne-interferometry--5653 |title=Heterodyne and homodyne interferometry |last=Chapman |first=Mark |publisher=Renishaw plc (UK) |date=2002 |access-date=14 February 2017 |archive-url=https://web.archive.org/web/20170726073548/http://resources.renishaw.com/en/download/white-paper-homodyne-and-heterodyne-interferometry--5653 |archive-date=26 July 2017 |url-status=dead |df=dmy-all }}&amp;lt;/ref&amp;gt;&lt;/div&gt;</summary>
		<author><name>Bensen</name></author>
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