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Silicon Coating Speed Calibrating

Sputtering speed depends not only on the input RF power but also related to the distance between the target and the sample. and the surface area of the sample. We have to calibrate the sputtering speed to make sure the thickness of the film we coated is correctly equal to a quarter lambda or a half lambda. We sputtered silicon film on the optical window to measure the thickness of different sputtering time. In this calibration experiment, we are using 100w power for RF signal, and the distance between the target and the sample is about 8cm, while the diameter of the glass (Optical Window) is 25.4mm. We tried for 6000s, 8000s, 10000s, 12000s, 20000s.

The estimated speed is drawn in the graph with dashed lines.